dc.contributor.author | Болотов, Г. П. | |
dc.contributor.author | Болотов, М. Г. | |
dc.contributor.author | Руденко, M. M. | |
dc.date.accessioned | 2018-05-15T13:19:11Z | |
dc.date.available | 2018-05-15T13:19:11Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | http://ir.stu.cn.ua/123456789/16367 | |
dc.description | Bolotov, G. P. Modification of Materials Surface Layers by Low-Energy Ion Irradiation in Glow Discharge [Electronic resource] / G. P. Bolotov, M. G. Bolotov, M. M. Rudenko // Electronics and Nanotechnology (ELNANO’2016) : IEEE 36th International Conference (Kiev, 19-21 April 2016).- Kiev : IEEE, 2016.- pp.135 - 140.- Режим доступу: https://ieeexplore.ieee.org/document/7493031/ | en_US |
dc.language.iso | en | en_US |
dc.publisher | Kiev : IEEE | en_US |
dc.subject | components of electronic devices | en_US |
dc.subject | modification of surface layers | en_US |
dc.subject | metal films | en_US |
dc.subject | diffusion mass transfer | en_US |
dc.subject | pressure welding | en_US |
dc.subject | ion bombardment | en_US |
dc.title | Modification of Materials Surface Layers by Low-Energy Ion Irradiation in Glow Discharge | en_US |
dc.type | Working Paper | en_US |