Modification of Materials Surface Layers by Low-Energy Ion Irradiation in Glow Discharge

dc.contributor.author	Болотов, Г. П.
dc.contributor.author	Болотов, М. Г.
dc.contributor.author	Руденко, M. M.
dc.date.accessioned	2018-05-15T13:19:11Z
dc.date.available	2018-05-15T13:19:11Z
dc.date.issued	2016
dc.identifier.uri	http://ir.stu.cn.ua/123456789/16367
dc.description	Bolotov, G. P. Modification of Materials Surface Layers by Low-Energy Ion Irradiation in Glow Discharge [Electronic resource] / G. P. Bolotov, M. G. Bolotov, M. M. Rudenko // Electronics and Nanotechnology (ELNANO’2016) : IEEE 36th International Conference (Kiev, 19-21 April 2016).- Kiev : IEEE, 2016.- pp.135 - 140.- Режим доступу: https://ieeexplore.ieee.org/document/7493031/	en_US
dc.language.iso	en	en_US
dc.publisher	Kiev : IEEE	en_US
dc.subject	components of electronic devices	en_US
dc.subject	modification of surface layers	en_US
dc.subject	metal films	en_US
dc.subject	diffusion mass transfer	en_US
dc.subject	pressure welding	en_US
dc.subject	ion bombardment	en_US
dc.title	Modification of Materials Surface Layers by Low-Energy Ion Irradiation in Glow Discharge	en_US
dc.type	Working Paper	en_US

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